EtherCAT Terminals
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          ID=5:
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        <td width="75%">Term 1 (EK1200)
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        <td colspan="2">
          EK1200-5000 EtherCAT Power supply (2A E-Bus)
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      </summary>
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                    ID=6:
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                  <td width="75%">E1 (EL2202)
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                  <td colspan="2">
                    EL2202 2Ch. Dig. Output 24V, 0.5A
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                    ID=20:
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                  <td width="75%">E2 (EL6070)
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                  <td colspan="2">
                    EL6070 1Ch. Licensing-Terminal
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                    ID=21:
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                  <td width="75%">GasNozzleX-EL7047
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                  <td>        </td>
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                            </td>
                  <td colspan="2">
                    EL7047 1Ch. Stepper motor output stage (50V, 5A)
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                    ID=22:
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                  <td width="75%">GasNozzleY-EL7047
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                  <td>        </td>
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                            </td>
                  <td colspan="2">
                    EL7047 1Ch. Stepper motor output stage (50V, 5A)
                  </td>
                </tr>
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                    ID=23:
                  </td>
                  <td width="75%">GasNozzleZ-EL7047
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                  <td>        </td>
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                            </td>
                  <td colspan="2">
                    EL7047 1Ch. Stepper motor output stage (50V, 5A)
                  </td>
                </tr>
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                  <td width="10%">
                    ID=24:
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                  <td width="75%">SamplePaddleX-EL7047
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                  <td>        </td>
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                <tr>
                  <td>
                            </td>
                  <td colspan="2">
                    EL7047 1Ch. Stepper motor output stage (50V, 5A)
                  </td>
                </tr>
              </table>
            </li>


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                  <table width="100%">
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                  <td width="10%">
                    ID=25:
                  </td>
                  <td width="75%">SamplePaddleY-EL7047
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                  <td>        </td>
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                <tr>
                  <td>
                            </td>
                  <td colspan="2">
                    EL7047 1Ch. Stepper motor output stage (50V, 5A)
                  </td>
                </tr>
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                  <table width="100%">
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                  <td width="10%">
                    ID=26:
                  </td>
                  <td width="75%">SamplePaddleZ-EL7047
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                  <td>        </td>
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                <tr>
                  <td>
                            </td>
                  <td colspan="2">
                    EL7047 1Ch. Stepper motor output stage (50V, 5A)
                  </td>
                </tr>
              </table>
            </li>


            <li>
                  <table width="100%">
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                  <td width="10%">
                    ID=27:
                  </td>
                  <td width="75%">Enc_GasNozzleX_Y-EL5042
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                  <td>        </td>
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                            </td>
                  <td colspan="2">
                    EL5042 2Ch. BiSS-C Encoder
                  </td>
                </tr>
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            <li>
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                  <td width="10%">
                    ID=28:
                  </td>
                  <td width="75%">Enc_GasNozzleZ_SamplePaddleX-EL5042
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                  <td>        </td>
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                  <td colspan="2">
                    EL5042 2Ch. BiSS-C Encoder
                  </td>
                </tr>
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                  <td width="10%">
                    ID=29:
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                  <td width="75%">Enc_SamplePaddleY_Z-EL5042
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                  <td>        </td>
                </tr>
                <tr>
                  <td>
                            </td>
                  <td colspan="2">
                    EL5042 2Ch. BiSS-C Encoder
                  </td>
                </tr>
              </table>
            </li>


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                  <table width="100%">
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                  <td width="10%">
                    ID=30:
                  </td>
                  <td width="75%">Bridge_E12 (EL6695)
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                  <td>        </td>
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                            </td>
                  <td colspan="2">
                    EL6695 EtherCAT Bridge terminal (Primary)
                  </td>
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                    ID=31:
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                  <td width="75%">End_Cover (EL9011)
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                  <td colspan="2">
                    EL9011 End Terminal
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            </li>

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    </details>
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