NC Settings
Axis ID |
Name |
|---|---|
1 |
Axis 1 - Diagnostic Paddle X |
2 |
Axis 2 - Diagnostic Paddle Y |
3 |
Axis 3 - Diagnostic Paddle Z |
4 |
Axis 4 - Objectives X |
5 |
Axis 5 - Objectives Y |
6 |
Axis 6 - Objectives Z |
7 |
Axis 7 - Point Detector Y |
8 |
Axis 8 - Point Detector Rotation |
9 |
Axis 9 - Illumination X |
10 |
Axis 10 - Illumination Y |
11 |
Axis 11 - Illumination Z |
12 |
Axis 12 - Questar X |
13 |
Axis 13 - Questar Y |
14 |
Axis 14 - SPARE 1 |
15 |
Axis 15 - SPARE 2 |
16 |
Axis 16 - SDS Injector X |
17 |
Axis 17 - SDS Injectory Y |
18 |
Axis 18 - SDS Injector Z |
19 |
Axis 19 - SDS Rotation X |
20 |
Axis 20 - SDS Jet Rotation |
21 |
Axis 21 - Questar Focus |
22 |
Cryo X |
23 |
Cryo Y |
24 |
Cryo Z |
25 |
Cryo rY |
26 |
RCI X |
27 |
RCI Y |
28 |
RCI Z |
29 |
RCI RX |
30 |
Beam X |
31 |
Beam Y |
32 |
Beam Z |
33 |
Camera X |
34 |
Camera Y |
35 |
Axis 35 - Outcoupling Lens Y |
36 |
Axis 36 - SDS Z Encoder |
37 |
M37-X |
38 |
M38-Y |
39 |
M39-Z |
40 |
M40-VLS-Slit-Top |
41 |
M41-VLS-Slit-Bottom |
42 |
M42-VLS-Slit-Right |
43 |
M43-VLS-Slit-Left |
44 |
M44-VLS-Mirror-Pitch |
45 |
M45-VLS-Grating-Pitch |
46 |
M46-VLS-Camera-Pitch |
47 |
M47-VLS-Camera-Dist |
48 |
M48- Cryopump Y10 |
49 |
M49- Cryopump Y11 |
50 |
SL2K2-BOTTOM-M50 |
51 |
SL2K2-TOP-M51 |
52 |
SL2K2-NORTH-M52 |
53 |
SL2K2-SOUTH-M53 |
Axis 1: Axis 1 - Diagnostic Paddle X
Setting |
Value |
|---|---|
Axis ID |
1 |
Name |
Axis 1 - Diagnostic Paddle X |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-24.963 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
80 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
10 |
Id |
1 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 2: Axis 2 - Diagnostic Paddle Y
Setting |
Value |
|---|---|
Axis ID |
2 |
Name |
Axis 2 - Diagnostic Paddle Y |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-214642.38 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
80 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-1 |
Id |
2 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 3: Axis 3 - Diagnostic Paddle Z
Setting |
Value |
|---|---|
Axis ID |
3 |
Name |
Axis 3 - Diagnostic Paddle Z |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-214578.372 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
100 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-10 |
Id |
3 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 4: Axis 4 - Objectives X
Setting |
Value |
|---|---|
Axis ID |
4 |
Name |
Axis 4 - Objectives X |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-35 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
32 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-2 |
Id |
4 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 5: Axis 5 - Objectives Y
Setting |
Value |
|---|---|
Axis ID |
5 |
Name |
Axis 5 - Objectives Y |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-214688.37 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
40 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-2 |
Id |
5 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 6: Axis 6 - Objectives Z
Setting |
Value |
|---|---|
Axis ID |
6 |
Name |
Axis 6 - Objectives Z |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-214714.368 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
8 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-8 |
Id |
6 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 7: Axis 7 - Point Detector Y
Setting |
Value |
|---|---|
Axis ID |
7 |
Name |
Axis 7 - Point Detector Y |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:MaxCount |
#xffffffff |
Enc:ScaleFactorNumerator |
5e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
50 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
20 |
Id |
7 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 8: Axis 8 - Point Detector Rotation
Setting |
Value |
|---|---|
Axis ID |
8 |
Name |
Axis 8 - Point Detector Rotation |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-115 |
Enc:ScaleFactorNumerator |
8.3333e-08 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
157 |
Enc:SoftEndMinControl:Range |
60 |
General:UnitName |
Degree |
Id |
8 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 9: Axis 9 - Illumination X
Setting |
Value |
|---|---|
Axis ID |
9 |
Name |
Axis 9 - Illumination X |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
3.9e-05 |
Id |
9 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
1 |
Axis 10: Axis 10 - Illumination Y
Setting |
Value |
|---|---|
Axis ID |
10 |
Name |
Axis 10 - Illumination Y |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
3.9e-05 |
Id |
10 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
1 |
Axis 11: Axis 11 - Illumination Z
Setting |
Value |
|---|---|
Axis ID |
11 |
Name |
Axis 11 - Illumination Z |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
3.9e-05 |
Id |
11 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
1 |
Axis 12: Axis 12 - Questar X
Setting |
Value |
|---|---|
Axis ID |
12 |
Name |
Axis 12 - Questar X |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-28 |
Enc:ScaleFactorNumerator |
5e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
15 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-2 |
Id |
12 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 13: Axis 13 - Questar Y
Setting |
Value |
|---|---|
Axis ID |
13 |
Name |
Axis 13 - Questar Y |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-214695.4 |
Enc:ScaleFactorNumerator |
5e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
32 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-2 |
Id |
13 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 14: Axis 14 - SPARE 1
Setting |
Value |
|---|---|
Axis ID |
14 |
Name |
Axis 14 - SPARE 1 |
AxisType |
1 |
CreateSymbols |
true |
Disabled |
true |
Enc:EncType |
1 |
Id |
14 |
OtherSettings:AllowMotionCmdToSlave |
true |
Axis 15: Axis 15 - SPARE 2
Setting |
Value |
|---|---|
Axis ID |
15 |
Name |
Axis 15 - SPARE 2 |
AxisType |
1 |
CreateSymbols |
true |
Disabled |
true |
Enc:EncType |
1 |
Id |
15 |
OtherSettings:AllowMotionCmdToSlave |
true |
Axis 16: Axis 16 - SDS Injector X
Setting |
Value |
|---|---|
Axis ID |
16 |
Name |
Axis 16 - SDS Injector X |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
5 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
5 |
Enc:EncType |
4 |
Enc:Inc:RefMode |
2 |
Enc:MaxCount |
#xffffffff |
Enc:ScaleFactorNumerator |
0.000293 |
Id |
16 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
1 |
Axis 17: Axis 17 - SDS Injectory Y
Setting |
Value |
|---|---|
Axis ID |
17 |
Name |
Axis 17 - SDS Injectory Y |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
5 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
5 |
Enc:EncType |
29 |
Enc:MaxCount |
#xffffffff |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Id |
17 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 18: Axis 18 - SDS Injector Z
Setting |
Value |
|---|---|
Axis ID |
18 |
Name |
Axis 18 - SDS Injector Z |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
4 |
Enc:Inc:RefMode |
2 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
2.35e-06 |
General:UnitName |
rev |
Id |
18 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
0.3 |
Axis 19: Axis 19 - SDS Rotation X
Setting |
Value |
|---|---|
Axis ID |
19 |
Name |
Axis 19 - SDS Rotation X |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
5 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
5 |
Dynamic:Jerk |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:ScaleFactorNumerator |
0.1758 |
General:UnitName |
Degree |
Id |
19 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:FastManual |
0.1 |
Velo:Maximum |
5 |
Velo:SlowManual |
0.1 |
Axis 20: Axis 20 - SDS Jet Rotation
Setting |
Value |
|---|---|
Axis ID |
20 |
Name |
Axis 20 - SDS Jet Rotation |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
5 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
5 |
Dynamic:Jerk |
1 |
Enc:EncType |
4 |
Enc:Inc:RefMode |
2 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
0.0003125 |
General:UnitName |
Degree |
Id |
20 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 21: Axis 21 - Questar Focus
Setting |
Value |
|---|---|
Axis ID |
21 |
Name |
Axis 21 - Questar Focus |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Dynamic:Jerk |
1 |
Enc:EncType |
1 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:ScaleFactorNumerator |
0.01625 |
Id |
21 |
OtherSettings:AllowMotionCmdToSlave |
true |
Axis 22: Cryo X
Setting |
Value |
|---|---|
Axis ID |
22 |
Name |
Cryo X |
AxisFolder |
CryoStat |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-31.22 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Id |
22 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
1.7 |
Axis 23: Cryo Y
Setting |
Value |
|---|---|
Axis ID |
23 |
Name |
Cryo Y |
AxisFolder |
CryoStat |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-215.0149 |
Enc:ScaleFactorNumerator |
5e-05 |
Id |
23 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
1.4 |
Axis 24: Cryo Z
Setting |
Value |
|---|---|
Axis ID |
24 |
Name |
Cryo Z |
AxisFolder |
CryoStat |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:Inverse |
true |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-922337203685459 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Id |
24 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
1.7 |
Axis 25: Cryo rY
Setting |
Value |
|---|---|
Axis ID |
25 |
Name |
Cryo rY |
AxisFolder |
CryoStat |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
2 |
Dynamic:DecelerationMaximum |
2 |
Dynamic:DelayTime |
0.004 |
Dynamic:Jerk |
2 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
2.29107e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
135 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
30 |
General:UnitName |
Degree |
Id |
25 |
OtherSettings:AllowMotionCmdToSlave |
true |
TargetPosControl:Range |
0.01 |
TargetPosControl:Time |
0.2 |
Velo:Maximum |
0.2 |
Axis 26: RCI X
Setting |
Value |
|---|---|
Axis ID |
26 |
Name |
RCI X |
AxisFolder |
RCI |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
2 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
2 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:Inverse |
true |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-922337203685433 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Id |
26 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
0.4 |
Axis 27: RCI Y
Setting |
Value |
|---|---|
Axis ID |
27 |
Name |
RCI Y |
AxisFolder |
RCI |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
2 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
2 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-32.4565 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Id |
27 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
1.7 |
Axis 28: RCI Z
Setting |
Value |
|---|---|
Axis ID |
28 |
Name |
RCI Z |
AxisFolder |
RCI |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
2 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
2 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:Inverse |
true |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-922337203685442 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Id |
28 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
1.7 |
Axis 29: RCI RX
Setting |
Value |
|---|---|
Axis ID |
29 |
Name |
RCI RX |
AxisFolder |
RCI |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
2 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
2 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
0.000234375 |
Id |
29 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2 |
Axis 30: Beam X
Setting |
Value |
|---|---|
Axis ID |
30 |
Name |
Beam X |
AxisFolder |
Beamblock |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-15658.9921 |
Enc:ScaleFactorNumerator |
0.000244 |
Id |
30 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2 |
Axis 31: Beam Y
Setting |
Value |
|---|---|
Axis ID |
31 |
Name |
Beam Y |
AxisFolder |
Beamblock |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-16005.009 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
0.000244 |
Id |
31 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
0.5 |
Axis 32: Beam Z
Setting |
Value |
|---|---|
Axis ID |
32 |
Name |
Beam Z |
AxisFolder |
Beamblock |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0fffffff |
Enc:Offset |
-1.0099 |
Id |
32 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2 |
Axis 33: Camera X
Setting |
Value |
|---|---|
Axis ID |
33 |
Name |
Camera X |
AxisFolder |
Camera |
AxisType |
1 |
CreateSymbols |
true |
Disabled |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-15555.0044 |
Enc:ScaleFactorNumerator |
0.000244 |
Id |
33 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2 |
Axis 34: Camera Y
Setting |
Value |
|---|---|
Axis ID |
34 |
Name |
Camera Y |
AxisFolder |
Camera |
AxisType |
1 |
CreateSymbols |
true |
Disabled |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-15754.9912 |
Enc:ScaleFactorNumerator |
0.000244 |
Id |
34 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2 |
Axis 35: Axis 35 - Outcoupling Lens Y
Setting |
Value |
|---|---|
Axis ID |
35 |
Name |
Axis 35 - Outcoupling Lens Y |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
1 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
1 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-214688.354 |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
45 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-1 |
Id |
35 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
5 |
Axis 36: Axis 36 - SDS Z Encoder
Setting |
Value |
|---|---|
Axis ID |
36 |
Name |
Axis 36 - SDS Z Encoder |
AxisType |
1 |
CreateSymbols |
true |
Enc:EncType |
29 |
Enc:MaxCount |
#xffffffff |
Enc:ReferenceSystem |
1 |
Enc:ScaleFactorNumerator |
5e-05 |
Id |
36 |
OtherSettings:AllowMotionCmdToSlave |
true |
Axis 37: M37-X
Setting |
Value |
|---|---|
Axis ID |
37 |
Name |
M37-X |
AxisFolder |
Catcher |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-1031807.3984 |
Enc:ScaleFactorNumerator |
0.000244 |
Id |
37 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2 |
Axis 38: M38-Y
Setting |
Value |
|---|---|
Axis ID |
38 |
Name |
M38-Y |
AxisFolder |
Catcher |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-16030.8359 |
Enc:ScaleFactorNumerator |
0.000244 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
10 |
Enc:SoftEndMinControl:Range |
-35 |
Id |
38 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
0.5 |
Axis 39: M39-Z
Setting |
Value |
|---|---|
Axis ID |
39 |
Name |
M39-Z |
AxisFolder |
Catcher |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
1 |
Dynamic:DecelerationMaximum |
10 |
Enc:EncType |
29 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#xffffffff |
Enc:Offset |
-16247.0975 |
Enc:ScaleFactorNumerator |
0.000244 |
Id |
39 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2 |
Axis 40: M40-VLS-Slit-Top
Setting |
Value |
|---|---|
Axis ID |
40 |
Name |
M40-VLS-Slit-Top |
AxisFolder |
VLS |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
4.49102 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
4.49102 |
Dynamic:DecelerationMaximum |
10 |
Dynamic:Jerk |
20.1692 |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
3.90625e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
19 |
Enc:SoftEndMinControl:Enable |
true |
Id |
40 |
OtherSettings:AllowMotionCmdToSlave |
true |
OtherSettings:PulseDistanceNeg |
1 |
OtherSettings:PulseDistancePos |
1 |
Velo:FastManual |
1 |
Velo:Maximum |
1 |
Velo:RefSearch |
0.1 |
Velo:RefSync |
0.1 |
Velo:SlowManual |
0.5 |
Axis 41: M41-VLS-Slit-Bottom
Setting |
Value |
|---|---|
Axis ID |
41 |
Name |
M41-VLS-Slit-Bottom |
AxisFolder |
VLS |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
4.49102 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
4.49102 |
Dynamic:DecelerationMaximum |
10 |
Dynamic:Jerk |
20.1692 |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
3.90625e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
24.5 |
Enc:SoftEndMinControl:Enable |
true |
Id |
41 |
OtherSettings:AllowMotionCmdToSlave |
true |
OtherSettings:PulseDistanceNeg |
1 |
OtherSettings:PulseDistancePos |
1 |
Velo:FastManual |
1 |
Velo:Maximum |
1 |
Velo:RefSearch |
0.1 |
Velo:RefSync |
0.1 |
Velo:SlowManual |
0.5 |
Axis 42: M42-VLS-Slit-Right
Setting |
Value |
|---|---|
Axis ID |
42 |
Name |
M42-VLS-Slit-Right |
AxisFolder |
VLS |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
4.49102 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
4.49102 |
Dynamic:DecelerationMaximum |
10 |
Dynamic:Jerk |
20.1692 |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
3.90625e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
48.1 |
Enc:SoftEndMinControl:Enable |
true |
Id |
42 |
OtherSettings:AllowMotionCmdToSlave |
true |
OtherSettings:PulseDistanceNeg |
1 |
OtherSettings:PulseDistancePos |
1 |
Velo:FastManual |
1 |
Velo:Maximum |
1 |
Velo:RefSearch |
0.1 |
Velo:RefSync |
0.1 |
Velo:SlowManual |
0.5 |
Axis 43: M43-VLS-Slit-Left
Setting |
Value |
|---|---|
Axis ID |
43 |
Name |
M43-VLS-Slit-Left |
AxisFolder |
VLS |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
4.49102 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
4.49102 |
Dynamic:DecelerationMaximum |
10 |
Dynamic:Jerk |
20.1692 |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
3.90625e-05 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
49 |
Enc:SoftEndMinControl:Enable |
true |
Id |
43 |
OtherSettings:AllowMotionCmdToSlave |
true |
OtherSettings:PulseDistanceNeg |
1 |
OtherSettings:PulseDistancePos |
1 |
Velo:FastManual |
1 |
Velo:Maximum |
0.5 |
Velo:RefSearch |
0.1 |
Velo:RefSync |
0.1 |
Velo:SlowManual |
0.5 |
Axis 44: M44-VLS-Mirror-Pitch
Setting |
Value |
|---|---|
Axis ID |
44 |
Name |
M44-VLS-Mirror-Pitch |
AxisFolder |
VLS |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
1.92472 |
Dynamic:AccelerationMaximum |
4 |
Dynamic:Deceleration |
1.92472 |
Dynamic:DecelerationMaximum |
4 |
Dynamic:Jerk |
18.5227 |
Enc:EncType |
4 |
Enc:Inc:RefMode |
2 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorDenominator |
4 |
Enc:ScaleFactorNumerator |
7.914e-05 |
Enc:SoftEndMaxControl:Range |
1.763 |
Enc:SoftEndMinControl:Range |
-0.2288 |
Id |
44 |
OtherSettings:AllowMotionCmdToSlave |
true |
OtherSettings:PulseDistanceNeg |
0.1 |
OtherSettings:PulseDistancePos |
0.1 |
TargetPosControl:Range |
0.01 |
TargetPosControl:Time |
3 |
Velo:FastManual |
0.1 |
Velo:Maximum |
0.4 |
Velo:RefSearch |
0.01 |
Velo:RefSync |
0.01 |
Velo:SlowManual |
0.05 |
Axis 45: M45-VLS-Grating-Pitch
Setting |
Value |
|---|---|
Axis ID |
45 |
Name |
M45-VLS-Grating-Pitch |
AxisFolder |
VLS |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
4.49102 |
Dynamic:AccelerationMaximum |
10 |
Dynamic:Deceleration |
4.49102 |
Dynamic:DecelerationMaximum |
10 |
Dynamic:Jerk |
20.1692 |
Enc:EncType |
4 |
Enc:Inc:RefMode |
2 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
1.2 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-1.74 |
Id |
45 |
OtherSettings:AllowMotionCmdToSlave |
true |
OtherSettings:PulseDistanceNeg |
0.5 |
OtherSettings:PulseDistancePos |
0.5 |
Velo:FastManual |
0.5 |
Velo:Maximum |
0.1 |
Velo:RefSearch |
0.05 |
Velo:RefSync |
0.01 |
Velo:SlowManual |
0.25 |
Axis 46: M46-VLS-Camera-Pitch
Setting |
Value |
|---|---|
Axis ID |
46 |
Name |
M46-VLS-Camera-Pitch |
AxisFolder |
VLS |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
0.89 |
Dynamic:AccelerationMaximum |
0.2 |
Dynamic:Deceleration |
0.89 |
Dynamic:DecelerationMaximum |
0.2 |
Dynamic:Jerk |
3.83306 |
Enc:EncType |
4 |
Enc:Inc:RefMode |
3 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:Inverse |
true |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
5.3515625e-07 |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
1 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-10 |
General:UnitName |
Degree |
Id |
46 |
OtherSettings:AllowMotionCmdToSlave |
true |
OtherSettings:PulseDistanceNeg |
1 |
OtherSettings:PulseDistancePos |
1 |
Velo:FastManual |
0.1 |
Velo:Maximum |
0.02 |
Velo:RefSearch |
0.01 |
Velo:RefSync |
0.01 |
Velo:SlowManual |
0.05 |
Axis 47: M47-VLS-Camera-Dist
Setting |
Value |
|---|---|
Axis ID |
47 |
Name |
M47-VLS-Camera-Dist |
AxisFolder |
VLS |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:Acceleration |
0.112494 |
Dynamic:AccelerationMaximum |
1.8 |
Dynamic:Deceleration |
0.112494 |
Dynamic:DecelerationMaximum |
1.8 |
Dynamic:Jerk |
0.506199 |
Enc:EncType |
4 |
Enc:Inc:RefMode |
2 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:Inverse |
true |
Enc:MaxCount |
#x0000ffff |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMaxControl:Range |
16 |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-15.5 |
Id |
47 |
OtherSettings:AllowMotionCmdToSlave |
true |
OtherSettings:PulseDistanceNeg |
0.1 |
OtherSettings:PulseDistancePos |
0.1 |
Velo:FastManual |
0.02 |
Velo:Maximum |
0.4 |
Velo:RefSearch |
0.05 |
Velo:RefSync |
0.05 |
Velo:SlowManual |
0.01 |
Axis 48: M48- Cryopump Y10
Setting |
Value |
|---|---|
Axis ID |
48 |
Name |
M48- Cryopump Y10 |
AxisFolder |
CryoPump |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:AccelerationMaximum |
5 |
Dynamic:DecelerationMaximum |
5 |
Dynamic:DelayTime |
0.008 |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
2.204861111e-05 |
Id |
48 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2 |
Velo:RefSearch |
0.2 |
Velo:RefSync |
0.2 |
Axis 49: M49- Cryopump Y11
Setting |
Value |
|---|---|
Axis ID |
49 |
Name |
M49- Cryopump Y11 |
AxisFolder |
CryoPump |
AxisType |
1 |
CreateSymbols |
true |
Dynamic:AccelerationMaximum |
5 |
Dynamic:DecelerationMaximum |
5 |
Dynamic:DelayTime |
0.008 |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:ScaleFactorNumerator |
2.204861111e-05 |
Id |
49 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2 |
Velo:RefSearch |
0.2 |
Velo:RefSync |
0.01 |
Axis 50: SL2K2-BOTTOM-M50
Setting |
Value |
|---|---|
Axis ID |
50 |
Name |
SL2K2-BOTTOM-M50 |
AxisFolder |
SL2K2-SCATTER |
AxisType |
1 |
CreateSymbols |
true |
Disabled |
true |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-30.61 |
Id |
50 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2.2 |
Velo:RefSearch |
0.2 |
Velo:RefSync |
0.05 |
Axis 51: SL2K2-TOP-M51
Setting |
Value |
|---|---|
Axis ID |
51 |
Name |
SL2K2-TOP-M51 |
AxisFolder |
SL2K2-SCATTER |
AxisType |
1 |
CreateSymbols |
true |
Disabled |
true |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:Inverse |
true |
Enc:MaxCount |
#x0000ffff |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-30.91 |
Id |
51 |
OtherSettings:AllowMotionCmdToSlave |
true |
PositionAreaControl:Range |
0.5 |
TargetPosControl:Range |
0.1 |
Velo:Maximum |
2.2 |
Velo:RefSearch |
0.2 |
Velo:RefSync |
0.05 |
Axis 52: SL2K2-NORTH-M52
Setting |
Value |
|---|---|
Axis ID |
52 |
Name |
SL2K2-NORTH-M52 |
AxisFolder |
SL2K2-SCATTER |
AxisType |
1 |
CreateSymbols |
true |
Disabled |
true |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:Inverse |
true |
Enc:MaxCount |
#x0000ffff |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-30.81 |
Id |
52 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2.2 |
Velo:RefSearch |
0.2 |
Velo:RefSync |
0.05 |
Axis 53: SL2K2-SOUTH-M53
Setting |
Value |
|---|---|
Axis ID |
53 |
Name |
SL2K2-SOUTH-M53 |
AxisFolder |
SL2K2-SCATTER |
AxisType |
1 |
CreateSymbols |
true |
Disabled |
true |
Enc:EncType |
4 |
Enc:Inc:RefSoftSyncMask |
#x0000ffff |
Enc:MaxCount |
#x0000ffff |
Enc:SoftEndMaxControl:Enable |
true |
Enc:SoftEndMinControl:Enable |
true |
Enc:SoftEndMinControl:Range |
-30.52 |
Id |
53 |
OtherSettings:AllowMotionCmdToSlave |
true |
Velo:Maximum |
2.2 |
Velo:RefSearch |
0.2 |
Velo:RefSync |
0.05 |