NC Settings

Axis ID

Name

1

Axis 1

2

Axis 2

3

Axis 3

4

Axis 4

5

Axis 5

6

Axis 6

7

Axis 7

8

Axis 8

9

Axis 9

10

Axis 10

11

Axis 11

12

Axis 12

13

Axis 13

14

Axis 14

15

Axis 15

16

Axis 16

17

Axis 17

18

Axis 18

19

Axis 19

20

Axis 20 IM1L0-XTES-MMS

21

Axis 21 IM1L0-XTES-CLZ

22

Axis 22 IM1L0-XTES-CLF

23

Axis 23 IM1L1-PPM-MMS

24

Axis 24 IM2L0-XTES-MMS

25

Axis 25 IM2L0-XTES-CLZ

26

Axis 26 IM2L0-XTES-CLF

27

Axis 27 IM3L0-PPM-MMS

28

Axis 28 IM4L0-XTES-MMS

29

Axis 29 IM4L0-XTES-CLZ

30

Axis 30 IM4L0-XTES-CLF

31

PF1L0-WFS-MMS-01

32

PF1L0-WFS-MMS-02

33

Axis 33

34

Axis 34

35

Axis 35

36

Axis 36

37

Axis 37

38

Axis 38

39

Axis 39

40

Axis 40

41

SL1L0-BOTTOM-M41

42

SL1L0-SOUTH-M42

43

SL1L0-TOP-M43

44

SL1L0-NORTH-M44

45

SL2L0-BOTTOM-M45

46

SL2L0-SOUTH-M46

47

SL2L0-TOP-M47

48

SL2L0-NORTH-M48

49

XTAL ANGLE X

50

XTAL VERT Y

51

RETICLE HORIZ X

52

RETICLE VERT Y

53

DIODE HORIZ X

54

DIODE VERT Y

Axis 1: Axis 1

Setting

Value

Axis ID

1

Name

Axis 1

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncMode

3

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-737.2695

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

1

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

PositionAreaControl:Enable

false

TargetPosControl:Enable

false

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 2: Axis 2

Setting

Value

Axis ID

2

Name

Axis 2

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-979.5313

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

2

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

PositionAreaControl:Range

0.1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 3: Axis 3

Setting

Value

Axis ID

3

Name

Axis 3

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-639.2227

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

3

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

PositionAreaControl:Range

0.1

TargetPosControl:Range

0.1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 4: Axis 4

Setting

Value

Axis ID

4

Name

Axis 4

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncMode

1

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-639.2227

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

4

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 5: Axis 5

Setting

Value

Axis ID

5

Name

Axis 5

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-248.0645

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

5

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 6: Axis 6

Setting

Value

Axis ID

6

Name

Axis 6

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-53.85

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

6

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 7: Axis 7

Setting

Value

Axis ID

7

Name

Axis 7

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-742.293

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

7

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 8: Axis 8

Setting

Value

Axis ID

8

Name

Axis 8

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-151.8945

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

8

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 9: Axis 9

Setting

Value

Axis ID

9

Name

Axis 9

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-445.0742

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

9

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 10: Axis 10

Setting

Value

Axis ID

10

Name

Axis 10

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-444.9375

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

10

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 11: Axis 11

Setting

Value

Axis ID

11

Name

Axis 11

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-114.6992

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

11

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 12: Axis 12

Setting

Value

Axis ID

12

Name

Axis 12

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-249.1875

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

12

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 13: Axis 13

Setting

Value

Axis ID

13

Name

Axis 13

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-784.3555

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

13

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 14: Axis 14

Setting

Value

Axis ID

14

Name

Axis 14

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-347.1094

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

14

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 15: Axis 15

Setting

Value

Axis ID

15

Name

Axis 15

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-737.5

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

15

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 16: Axis 16

Setting

Value

Axis ID

16

Name

Axis 16

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncMode

3

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-151.457

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

16

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 17: Axis 17

Setting

Value

Axis ID

17

Name

Axis 17

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-346.8672

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

17

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 18: Axis 18

Setting

Value

Axis ID

18

Name

Axis 18

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-882.52

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

18

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 19: Axis 19

Setting

Value

Axis ID

19

Name

Axis 19

AxisFolder

AT2L0-SOLID

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

500

Dynamic:DecelerationMaximum

600

Dynamic:Jerk

100

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-541.9961

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00390625

Id

19

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

6

Velo:Maximum

12.5

Velo:RefSearch

6

Velo:RefSync

6

Velo:SlowManual

1

Axis 20: Axis 20 IM1L0-XTES-MMS

Setting

Value

Axis ID

20

Name

Axis 20 IM1L0-XTES-MMS

AxisFolder

IM1L0-XTES

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

10

Dynamic:AccelerationMaximum

10

Dynamic:Deceleration

10

Dynamic:DecelerationMaximum

10

Enc:EncType

7

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:Offset

-88.86

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.002716064453

Enc:SoftEndMaxControl:Enable

true

Enc:SoftEndMinControl:Enable

true

Enc:SoftEndMinControl:Range

-89

Id

20

OtherSettings:AllowMotionCmdToSlave

true

TargetPosControl:Range

0.05

Velo:Maximum

10

Axis 21: Axis 21 IM1L0-XTES-CLZ

Setting

Value

Axis ID

21

Name

Axis 21 IM1L0-XTES-CLZ

AxisFolder

IM1L0-XTES

AxisType

1

CreateSymbols

true

Enc:EncType

4

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ScaleFactorNumerator

0.003

Enc:SoftEndMaxControl:Range

100

Enc:SoftEndMinControl:Range

-100

General:UnitName

%

Id

21

OtherSettings:AllowMotionCmdToSlave

true

Velo:Maximum

10

Velo:RefSearch

5

Velo:RefSync

1

Axis 22: Axis 22 IM1L0-XTES-CLF

Setting

Value

Axis ID

22

Name

Axis 22 IM1L0-XTES-CLF

AxisFolder

IM1L0-XTES

AxisType

1

CreateSymbols

true

Enc:EncType

4

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ScaleFactorNumerator

0.008

Enc:SoftEndMaxControl:Range

100

Enc:SoftEndMinControl:Range

-100

General:UnitName

%

Id

22

OtherSettings:AllowMotionCmdToSlave

true

Velo:Maximum

10

Velo:RefSearch

5

Velo:RefSync

1

Axis 23: Axis 23 IM1L1-PPM-MMS

Setting

Value

Axis ID

23

Name

Axis 23 IM1L1-PPM-MMS

AxisFolder

IM1L1-PPM

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

200

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

200

Dynamic:DecelerationMaximum

200

Dynamic:DelayTime

0.004

Dynamic:Jerk

1000

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-214686.941

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

5e-05

Enc:SoftEndMaxControl:Enable

true

Enc:SoftEndMaxControl:Range

-11

Enc:SoftEndMinControl:Enable

true

Enc:SoftEndMinControl:Range

-101.12

Id

23

MotionControl:Enable

true

MotionControl:Range

0.0005

MotionControl:Time

1

OtherSettings:AllowMotionCmdToSlave

true

TargetPosControl:Range

0.01

TargetPosControl:Time

1

Velo:Maximum

65

Axis 24: Axis 24 IM2L0-XTES-MMS

Setting

Value

Axis ID

24

Name

Axis 24 IM2L0-XTES-MMS

AxisFolder

IM2L0-XTES

AxisType

1

CreateSymbols

true

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-214726.1651

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

5e-05

Enc:SoftEndMaxControl:Enable

true

Enc:SoftEndMaxControl:Range

100

Enc:SoftEndMinControl:Enable

true

Enc:SoftEndMinControl:Range

-89

Id

24

OtherSettings:AllowMotionCmdToSlave

true

Velo:Maximum

10

Axis 25: Axis 25 IM2L0-XTES-CLZ

Setting

Value

Axis ID

25

Name

Axis 25 IM2L0-XTES-CLZ

AxisFolder

IM2L0-XTES

AxisType

1

CreateSymbols

true

Enc:EncType

4

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ScaleFactorNumerator

0.003

Enc:SoftEndMaxControl:Range

100

Enc:SoftEndMinControl:Range

-100

General:UnitName

%

Id

25

OtherSettings:AllowMotionCmdToSlave

true

Velo:Maximum

10

Velo:RefSearch

5

Velo:RefSync

1

Axis 26: Axis 26 IM2L0-XTES-CLF

Setting

Value

Axis ID

26

Name

Axis 26 IM2L0-XTES-CLF

AxisFolder

IM2L0-XTES

AxisType

1

CreateSymbols

true

Enc:EncType

4

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ScaleFactorNumerator

0.008

Enc:SoftEndMaxControl:Range

100

Enc:SoftEndMinControl:Range

-100

General:UnitName

%

Id

26

OtherSettings:AllowMotionCmdToSlave

true

Velo:Maximum

10

Velo:RefSearch

5

Velo:RefSync

1

Axis 27: Axis 27 IM3L0-PPM-MMS

Setting

Value

Axis ID

27

Name

Axis 27 IM3L0-PPM-MMS

AxisFolder

IM3L0-PPM

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

200

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

200

Dynamic:DecelerationMaximum

200

Dynamic:DelayTime

0.004

Dynamic:Jerk

1000

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-214686.941

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

5e-05

Enc:SoftEndMaxControl:Range

-8

Enc:SoftEndMinControl:Range

-92.82

Id

27

MotionControl:Enable

true

MotionControl:Range

0.0005

MotionControl:Time

1

OtherSettings:AllowMotionCmdToSlave

true

TargetPosControl:Range

0.01

TargetPosControl:Time

1

Velo:Maximum

65

Axis 28: Axis 28 IM4L0-XTES-MMS

Setting

Value

Axis ID

28

Name

Axis 28 IM4L0-XTES-MMS

AxisFolder

IM4L0-XTES

AxisType

1

CreateSymbols

true

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-214724.5014

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

5e-05

Enc:SoftEndMaxControl:Enable

true

Enc:SoftEndMinControl:Enable

true

Enc:SoftEndMinControl:Range

-89

Id

28

OtherSettings:AllowMotionCmdToSlave

true

Velo:Maximum

10

Axis 29: Axis 29 IM4L0-XTES-CLZ

Setting

Value

Axis ID

29

Name

Axis 29 IM4L0-XTES-CLZ

AxisFolder

IM4L0-XTES

AxisType

1

CreateSymbols

true

Enc:EncType

4

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ScaleFactorNumerator

0.003

Enc:SoftEndMaxControl:Range

100

Enc:SoftEndMinControl:Range

-100

General:UnitName

%

Id

29

OtherSettings:AllowMotionCmdToSlave

true

Velo:Maximum

10

Velo:RefSearch

5

Velo:RefSync

1

Axis 30: Axis 30 IM4L0-XTES-CLF

Setting

Value

Axis ID

30

Name

Axis 30 IM4L0-XTES-CLF

AxisFolder

IM4L0-XTES

AxisType

1

CreateSymbols

true

Enc:EncType

4

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ScaleFactorNumerator

0.008

Enc:SoftEndMaxControl:Range

100

Enc:SoftEndMinControl:Range

-100

General:UnitName

%

Id

30

OtherSettings:AllowMotionCmdToSlave

true

Velo:Maximum

10

Velo:RefSearch

5

Velo:RefSync

1

Axis 31: PF1L0-WFS-MMS-01

Setting

Value

Axis ID

31

Name

PF1L0-WFS-MMS-01

AxisFolder

PF1L0-WFS

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

10

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

10

Dynamic:DecelerationMaximum

200

Dynamic:DelayTime

0.004

Dynamic:Jerk

500

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x00400000

Enc:Offset

-358.0066

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

5e-05

Enc:SoftEndMaxControl:Enable

true

Enc:SoftEndMaxControl:Range

-12

Enc:SoftEndMinControl:Enable

true

Enc:SoftEndMinControl:Range

-98

Id

31

OtherSettings:AllowMotionCmdToSlave

true

TargetPosControl:Range

0.002

TargetPosControl:Time

2

Velo:Maximum

20

Axis 32: PF1L0-WFS-MMS-02

Setting

Value

Axis ID

32

Name

PF1L0-WFS-MMS-02

AxisFolder

PF1L0-WFS

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

10

Dynamic:AccelerationMaximum

200

Dynamic:Deceleration

50

Dynamic:DecelerationMaximum

200

Dynamic:Jerk

500

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

5e-05

Enc:SoftEndMaxControl:Enable

true

Enc:SoftEndMaxControl:Range

50

Enc:SoftEndMinControl:Enable

true

Enc:SoftEndMinControl:Range

20

Id

32

OtherSettings:AllowMotionCmdToSlave

true

Velo:Maximum

5

Axis 33: Axis 33

Setting

Value

Axis ID

33

Name

Axis 33

AxisFolder

RTDSL0

AxisType

1

CreateSymbols

true

Enc:EncType

4

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ScaleFactorNumerator

4.53125e-05

Enc:SoftEndMaxControl:Enable

true

Enc:SoftEndMaxControl:Range

1

Enc:SoftEndMinControl:Enable

true

Enc:SoftEndMinControl:Range

-35

Id

33

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

50

OtherSettings:PulseDistancePos

100

Velo:FastManual

20

Velo:Maximum

2

Velo:RefSearch

1

Velo:RefSync

0.1

Velo:SlowManual

5

Axis 34: Axis 34

Setting

Value

Axis ID

34

Name

Axis 34

AxisFolder

RTDSL0

AxisType

1

CreateSymbols

true

Enc:EncType

1

Id

34

OtherSettings:AllowMotionCmdToSlave

true

Axis 35: Axis 35

Setting

Value

Axis ID

35

Name

Axis 35

AxisFolder

RTDSL0

AxisType

1

CreateSymbols

true

Enc:EncType

1

Id

35

OtherSettings:AllowMotionCmdToSlave

true

Axis 36: Axis 36

Setting

Value

Axis ID

36

Name

Axis 36

AxisFolder

RTDSL0

AxisType

1

CreateSymbols

true

Enc:EncType

1

Id

36

OtherSettings:AllowMotionCmdToSlave

true

Axis 37: Axis 37

Setting

Value

Axis ID

37

Name

Axis 37

AxisFolder

RTDSL0

AxisType

1

CreateSymbols

true

Enc:EncType

7

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ReferenceSystem

1

Id

37

OtherSettings:AllowMotionCmdToSlave

true

Axis 38: Axis 38

Setting

Value

Axis ID

38

Name

Axis 38

AxisFolder

RTDSL0

AxisType

1

CreateSymbols

true

Enc:EncType

1

Id

38

OtherSettings:AllowMotionCmdToSlave

true

Axis 39: Axis 39

Setting

Value

Axis ID

39

Name

Axis 39

AxisFolder

RTDSL0

AxisType

1

CreateSymbols

true

Enc:EncType

1

Id

39

OtherSettings:AllowMotionCmdToSlave

true

Axis 40: Axis 40

Setting

Value

Axis ID

40

Name

Axis 40

AxisFolder

RTDSL0

AxisType

1

CreateSymbols

true

Enc:EncType

1

Id

40

OtherSettings:AllowMotionCmdToSlave

true

Axis 41: SL1L0-BOTTOM-M41

Setting

Value

Axis ID

41

Name

SL1L0-BOTTOM-M41

AxisFolder

SL1L0-POWER

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.190144

Dynamic:AccelerationMaximum

0.8

Dynamic:Deceleration

0.190144

Dynamic:DecelerationMaximum

0.8

Dynamic:Jerk

0.106337

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-39.4145

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

5e-05

Id

41

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

0.02

OtherSettings:PulseDistancePos

0.02

PositionAreaControl:Range

0.16

TargetPosControl:Range

0.08

Velo:FastManual

0.02

Velo:Maximum

0.5

Velo:RefSearch

0.01

Velo:RefSync

0.01

Velo:SlowManual

0.02

Axis 42: SL1L0-SOUTH-M42

Setting

Value

Axis ID

42

Name

SL1L0-SOUTH-M42

AxisFolder

SL1L0-POWER

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.190144

Dynamic:AccelerationMaximum

0.8

Dynamic:Deceleration

0.190144

Dynamic:DecelerationMaximum

0.8

Dynamic:Jerk

0.106337

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-214727.5249

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

5e-05

Id

42

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

0.02

OtherSettings:PulseDistancePos

0.02

PositionAreaControl:Range

0.16

TargetPosControl:Range

0.08

Velo:FastManual

0.02

Velo:Maximum

0.5

Velo:RefSearch

0.01

Velo:RefSync

0.01

Velo:SlowManual

0.02

Axis 43: SL1L0-TOP-M43

Setting

Value

Axis ID

43

Name

SL1L0-TOP-M43

AxisFolder

SL1L0-POWER

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.190144

Dynamic:AccelerationMaximum

0.8

Dynamic:Deceleration

0.190144

Dynamic:DecelerationMaximum

0.8

Dynamic:Jerk

0.106337

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-15.2986

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

5e-05

Id

43

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

0.02

OtherSettings:PulseDistancePos

0.02

PositionAreaControl:Range

0.16

TargetPosControl:Range

0.08

Velo:FastManual

0.02

Velo:Maximum

0.5

Velo:RefSearch

0.01

Velo:RefSync

0.01

Velo:SlowManual

0.02

Axis 44: SL1L0-NORTH-M44

Setting

Value

Axis ID

44

Name

SL1L0-NORTH-M44

AxisFolder

SL1L0-POWER

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.190144

Dynamic:AccelerationMaximum

0.8

Dynamic:Deceleration

0.190144

Dynamic:DecelerationMaximum

0.8

Dynamic:Jerk

0.106337

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:Offset

-214705.4742

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

5e-05

Id

44

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

0.02

OtherSettings:PulseDistancePos

0.02

PositionAreaControl:Range

0.16

TargetPosControl:Range

0.08

Velo:FastManual

0.02

Velo:Maximum

0.5

Velo:RefSearch

0.01

Velo:RefSync

0.01

Velo:SlowManual

0.02

Axis 45: SL2L0-BOTTOM-M45

Setting

Value

Axis ID

45

Name

SL2L0-BOTTOM-M45

AxisFolder

SL2L0-POWER

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.190144

Dynamic:AccelerationMaximum

0.8

Dynamic:Deceleration

0.190144

Dynamic:DecelerationMaximum

0.8

Dynamic:Jerk

0.106337

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:ScaleFactorNumerator

5e-05

Id

45

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

0.02

OtherSettings:PulseDistancePos

0.02

PositionAreaControl:Range

0.16

TargetPosControl:Range

0.08

Velo:FastManual

0.02

Velo:Maximum

0.5

Velo:RefSearch

0.01

Velo:RefSync

0.01

Velo:SlowManual

0.02

Axis 46: SL2L0-SOUTH-M46

Setting

Value

Axis ID

46

Name

SL2L0-SOUTH-M46

AxisFolder

SL2L0-POWER

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.190144

Dynamic:AccelerationMaximum

0.8

Dynamic:Deceleration

0.190144

Dynamic:DecelerationMaximum

0.8

Dynamic:Jerk

0.106337

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:Inverse

true

Enc:MaxCount

#xffffffff

Enc:ScaleFactorNumerator

5e-05

Id

46

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

0.02

OtherSettings:PulseDistancePos

0.02

PositionAreaControl:Range

0.16

TargetPosControl:Range

0.08

Velo:FastManual

0.02

Velo:Maximum

0.5

Velo:RefSearch

0.01

Velo:RefSync

0.01

Velo:SlowManual

0.02

Axis 47: SL2L0-TOP-M47

Setting

Value

Axis ID

47

Name

SL2L0-TOP-M47

AxisFolder

SL2L0-POWER

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.190144

Dynamic:AccelerationMaximum

0.8

Dynamic:Deceleration

0.190144

Dynamic:DecelerationMaximum

0.8

Dynamic:Jerk

0.106337

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#xffffffff

Enc:ScaleFactorNumerator

5e-05

Id

47

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

0.02

OtherSettings:PulseDistancePos

0.02

PositionAreaControl:Range

0.16

TargetPosControl:Range

0.08

Velo:FastManual

0.02

Velo:Maximum

0.5

Velo:RefSearch

0.01

Velo:RefSync

0.01

Velo:SlowManual

0.02

Axis 48: SL2L0-NORTH-M48

Setting

Value

Axis ID

48

Name

SL2L0-NORTH-M48

AxisFolder

SL2L0-POWER

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.190144

Dynamic:AccelerationMaximum

0.8

Dynamic:Deceleration

0.190144

Dynamic:DecelerationMaximum

0.8

Dynamic:Jerk

0.106337

Enc:EncType

29

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:Inverse

true

Enc:MaxCount

#xffffffff

Enc:ScaleFactorNumerator

5e-05

Id

48

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

0.02

OtherSettings:PulseDistancePos

0.02

PositionAreaControl:Range

0.16

TargetPosControl:Range

0.08

Velo:FastManual

0.02

Velo:Maximum

0.5

Velo:RefSearch

0.01

Velo:RefSync

0.01

Velo:SlowManual

0.02

Axis 49: XTAL ANGLE X

Setting

Value

Axis ID

49

Name

XTAL ANGLE X

AxisFolder

SP1L0-KMONO

AxisType

1

CreateSymbols

true

Enc:EncType

4

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ScaleFactorNumerator

0.015625

General:UnitName

steps

Id

49

OtherSettings:AllowMotionCmdToSlave

true

Axis 50: XTAL VERT Y

Setting

Value

Axis ID

50

Name

XTAL VERT Y

AxisFolder

SP1L0-KMONO

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

100

Dynamic:Deceleration

100

Dynamic:DelayTime

0.008

Dynamic:Jerk

2500

Enc:EncType

7

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00172565918

Id

50

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

0.5

OtherSettings:PulseDistancePos

0.5

Velo:FastManual

5

Velo:Maximum

0.5

Velo:SlowManual

3

Axis 51: RETICLE HORIZ X

Setting

Value

Axis ID

51

Name

RETICLE HORIZ X

AxisFolder

SP1L0-KMONO

AxisType

1

CreateSymbols

true

Dynamic:DelayTime

0.008

Enc:EncType

7

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.0006942810059

Id

51

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

3

Velo:Maximum

3

Velo:RefSearch

3

Velo:RefSync

3

Velo:SlowManual

1

Axis 52: RETICLE VERT Y

Setting

Value

Axis ID

52

Name

RETICLE VERT Y

AxisFolder

SP1L0-KMONO

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.874139

Dynamic:Deceleration

0.178818

Dynamic:DelayTime

0.008

Dynamic:Jerk

152.824

Enc:EncType

4

Enc:Inc:RefMode

2

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ScaleFactorNumerator

7.9609375e-05

Id

52

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

3

OtherSettings:PulseDistancePos

3

Velo:FastManual

5

Velo:Maximum

3

Velo:RefSearch

2

Velo:RefSync

2

Velo:SlowManual

3

Axis 53: DIODE HORIZ X

Setting

Value

Axis ID

53

Name

DIODE HORIZ X

AxisFolder

SP1L0-KMONO

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.874139

Dynamic:Deceleration

0.178818

Dynamic:Jerk

68.11

Enc:EncType

7

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.00071144104

Id

53

OtherSettings:AllowMotionCmdToSlave

true

OtherSettings:PulseDistanceNeg

1

OtherSettings:PulseDistancePos

1

Velo:FastManual

3

Velo:Maximum

4

Velo:SlowManual

1

Axis 54: DIODE VERT Y

Setting

Value

Axis ID

54

Name

DIODE VERT Y

AxisFolder

SP1L0-KMONO

AxisType

1

CreateSymbols

true

Dynamic:Acceleration

0.874139

Dynamic:Deceleration

0.178818

Dynamic:Jerk

152.824

Enc:EncType

7

Enc:Inc:RefSoftSyncMask

#x0000ffff

Enc:MaxCount

#x0000ffff

Enc:ReferenceSystem

1

Enc:ScaleFactorNumerator

0.003008065796

Id

54

OtherSettings:AllowMotionCmdToSlave

true

Velo:FastManual

3

Velo:Maximum

3

Velo:SlowManual

2